We offers custom made sputtering systems in a array of configurations. From small lab systems with single circular cathodes, batch type systems with rectangular cathodes as well as inline machines. This allows us to provide the value to our customers of specific application design, rather than a fit-all-system, which more than likely needs to be modified to fit the application. Inquiries for specific application designed system(s) will be quoted quickly, please contact us for details.

Cluster Systems

We offer multi chamber systems with substrate handling under vacuum tailored to your specific needs. There are a number of available configurations which include load lock chambers, transfer chambers and process modules for sputter and RIE processes, as an example. Inquiries for specific application designed system(s) will be quoted quickly, please contact us for details.