Our modular concept for plasma systems is very flexible, especially as a lab unit for developing new coating or processes. These systems are suitable for a great number of applications, i.e. detailed cleaning, activation of surfaces, reactive ion etching (RIE) and coating (PVD). This concept enables us to manufacture highly developed systems at a low price, which benefit our customers through reasonable prices. Another plus is that one single system can be used for a variety of different applications.

The main idea of this concept is to make the highest possible number of system components easily interchangeable, meaning both interchangeable with each other and modified, if necessary, via new components, for example when our customer wants to try or develop a new application.

As can be seen in the diagram below, the basic element of the process chamber is a cube shaped stainless steel frame. Six sheet metal plates (modules), designed to fulfill different functions, are fixed to this frame. Depending on the application, the modules are manufactured from stainless steel or aluminum.

Since all of the modules have the same dimensions (a cube), they can be interchanged or replaced with other components very easily and quickly. Thus, it is not necessary to get an entirely new process chamber for a slightly different application that may only require two new flanges or a different chamber door. In some cases, it we can exchange two or three modules among each other.

Furthermore, the customer can select between different plasma sources (DC, MF, RF or MW), pumps, etc. The set-up of the system depends merely on the application – everything can easily be modified.

We currently offers three standard vacuum chambers, other sizes are also available by request.

The complete system including pump(s), controls, generator, etc. is mounted on a stand that requires a maximum floor space of approx. 16 sq. ft. (1.5m²). The total height of the system mainly depends on the size of the chamber.

The currently available vacuum chambers include these three standard sizes:

System 7

29.5×29.5×29.5 in (750x750x750 mm)

14.9 ft³ (.422 m³)

System 5

19.6×19.6×19.6 in (500x500x500 mm)

4.4 ft³ (.125 m³)

System 3

13.7×13.7×13.7 in (350x350x350 mm)

1.5 ft³ (.043 m³)