Our fully integrated and turnkey compact microwave plasma system is ready for delivery for your special project.
Here are the details that you may find helpful in your review of this unique system.
Features:
- Compact systems, minimized footprint
- High plasma densities for short process times
- Optimized homogeneity by plasma-array with 2-dimensional gas inlet system
- High loading capacity
General Data
| Dimensions (WxDxH): | 39″ x 31″ x 70″ (1.0 x 0.8 x 1.8 m) | |
| Chamber volume: | 1830 Inch³ (30 Liters) | |
| Supply voltage: | 3/N/PE AC 400/230V | |
| Gas supply: | Up to 4 mass flow controllers with a flow rate of up to 500 sccm each | |
Microwave Supply
| Frequency: | 2.45 GHz | |
| Max. power: | 2 kW, pulsed 4 kW |